Job queue management system and method thereof, including clustering wafer lots processed by common recipe into group, and creating process job and control job

ABSTRACT

A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.

BACKGROUND

The present invention relates to job queue management technology, andmore particularly, to a method and system of job queue management inwafer fabrication.

A conventional semiconductor factory typically includes requisitefabrication tools to process semiconductor wafers for a particularpurpose, employing processes such as photolithography,chemical-mechanical polishing, or chemical vapor deposition. Duringmanufacture, the semiconductor wafer passes through a series of processsteps, performed by various fabrication tools. For example, in theproduction of an integrated semiconductor product, the semiconductorwafer can pass through up to 600 process steps.

The wafers are typically stored in containers, such as cassettes, eachof which holds up to 25 wafers. The cassettes are then loaded incarriers, such as standard mechanical interfaces (SMIFs) or frontopening unified pods (FOUPs) for transport throughout the factory. Acarrier may contain multiple wafer lots to undergo a fabrication task. Apreparation is performed when changing process recipe. For example, animplanter must spend 10 minutes beam tuning and subsequently another 10minutes in to implant ions upon 25 wafers. Conventionally, fabricationtools use much time repeatedly performing preparations even when waferlots corresponding to a common recipe, are interlaced in a carrier ormultiple carriers. For example, if four wafer lots, such as “lot1”,“lot2”, “lot3” and “lot4”, may require sequential implantation accordingto “recipe1”, “recipe2”, “recipe1” and “recipe2”, twenty minutes will bewasted performing redundant beam tunings.

In view of these limitations, a need exists for an apparatus and methodof job queue management that arranges process jobs according to commonrecipes, thereby reducing preparation time.

SUMMARY

It is therefore an object of the present invention to provide a systemand method of job queue management that arranges process jobs accordingto common recipes, thereby reducing preparation time.

According to an embodiment of the invention, the system includes a jobqueue management apparatus and a fabrication tool.

The fabrication tool typically performs a single wafer fabrication taskon the wafers in a given lot. The wafer fabrication task is performedaccording to a predefined procedure (i.e., a predetermined set of stepsor “recipe”). When changing recipe, the fabrication tool performs apreparation task. A process job is provided to associate with one ormore wafer lots and specify a particular recipe. A control job withrelevant priority is provided to manage the process job sequence. Whenexecuting a process job, a process job start event is provided to thejob queue management apparatus.

The job queue management apparatus includes a central processing unit(CPU), memory, a storage device, an input device, a display device and acommunication device. The CPU is controlled by instructions from thememory and an operator through the input device, and executes job queuemanagement functions correspondingly.

The memory preferably includes a job initiation module and a jobrearrangement module, which include routines to perform job queuemanagement functions.

The object of the job initiation module is to create and arrange theprocess and control job order, thus enabling the fabrication tool toprocess wafer lots utilizing a common recipe. The detection of commonrecipes can be achieved by a “RecipeID” identity or a“RecipeVariableList” list. The job initiation module acquires wafer lotinformation regarding which specific wafers require processing by whichrecipe from a manufacturing execution system (MES) or a computerintegrated manufacturing (CIM) system. The job initiation moduleclusters wafer lots processed by a common recipe into a common processprogram (CPP) group and creates a process job containing wafer lots inthe CPP group. A control job containing at least one process job withpriority is created. The control jobs are arranged in descending orderaccording to the control job priorities.

The job rearrangement module acquires a current recipe after receiving aprocess job start event from the fabrication tool. The job rearrangementmodule acquires all control jobs and process jobs therewith. A controljob containing a common recipe is detected by comparing the currentlyperformed recipe. The detected control job with priority equaling thatof the current control job, is moved to the top of job queue.

BRIEF DESCRIPTION OF THE DRAWINGS

The aforementioned objects, features and advantages of this inventionwill become apparent by referring to the following detailed descriptionof the preferred embodiment with reference to the accompanying drawings,wherein:

FIG. 1 is a diagram of the architecture of the system for job queuemanagement according to the present invention;

FIG. 2 is a diagram of the architecture of the job queue managementapparatus according to the present invention;

FIGS. 3 a, 4 a and 5 a are schematic diagrams of fabrication toolsillustrating three embodiments of the present invention;

FIGS. 3 b, 4 b and 5 b are schematic diagrams of the job queueillustrating three embodiments of the present invention;

FIG. 6 is a flowchart showing the method of job queue managementaccording to the present invention;

FIG. 7 is a diagram of a storage medium for a computer program providingthe method of job queue management according to the invention.

DESCRIPTION

FIG. 1 is a diagram of the architecture of the system for job queuemanagement according to the present invention. According to theinvention, the system includes a job queue management apparatus 10 and afabrication tool 21.

The fabrication tool 21 typically performs a single wafer fabricationtask on the wafers in a given lot. For example, a particular fabricationtool may perform layering, patterning, doping, implanting or heattreatment operations on the wafers. In a preferred embodiment describedhereafter, the fabrication tool 21 provides software services compliantto 300 mm semiconductor equipment and material international (SEMI)standard specifying transport protocol, message format andfunctionality. A process job is provided for association with one ormore wafer lots and to specify a particular recipe, and a control jobwith relevant priority is provided to manage the process job sequence.When executing a process job, an E40 event indicating a process jobstart is introduced by SEMI, such as “E40:PJ_SettingUpToExec”,“E40:PJ_WaitingStartToExec” or others, is sent to the job queuemanagement apparatus 10.

FIG. 2 is a diagram of the architecture of the job queue managementapparatus according to the present invention. The job queue managementapparatus 10 includes a central processing unit (CPU) 11, memory 12, astorage device 13, an input device 14, a display device 15 and acommunication device 16. The CPU 11 is connected by buses 17 to thememory 12, storage device 13, input device 14, display device 15 andcommunication device 16 based on Von Neumann architecture. The CPU 11,memory 12, storage device 13, display device 15, input device 14 andcommunication device 16 may be conventionally incorporated to amainframe computer, a mini-computer, a workstation computer, a hostcomputer, a personal computer, or a mobile computer.

The CPU 11, controlled by instructions from the memory 12 and anoperator through the input device 14, executes job queue managementfunctions. The storage device 13 can be implemented as a databasesystem, a file, or the like.

The memory 12 is preferably a random access memory (RAM), but may alsoinclude read-only memory (ROM) or flash ROM. The memory 12 preferablyincludes a job initiation module 121 and a job rearrangement module 122,which include routines to perform job queue management functions.

The object of the job initiation module 121 is to create and arrange theprocess and control job order, thus enabling the fabrication tool 21 toprocess wafer lots performed by a common recipe. The detection of commonrecipes can be achieved by a “RecipeID” identity or a“RecipeVariableList” list. The job initiation module 121 acquires waferlot information regarding which specific wafers require processing bywhich recipe from a manufacturing execution system (MES) (not shown) ora computer integrated manufacturing (CIM) system (not shown). The jobinitiation module 121 clusters wafer lots processed by a common recipeinto a common process program (CPP) group and creates a process jobcontaining wafer lots in the CPP group by executing an E40 serviceintroduced by SEMI, such as “E40:S16F3_PrJobCreate”,“E40:S16F11_PRJobCreateEnh” or others. A control job with a priorityassociated with at least one process job is created by executing an E94service, such as “E94:S14F9_CJCreate” or others. The control jobs arearranged in descending order according to control job priorities.

The job rearrangement module 122 receives an E40 event indicating aprocess job start, such as “E40:PJ_SettingUpToExec”,“E40:PJ_WaitingStartToExec” or other, from the fabrication tool 21.After that, a currently performed recipe is acquired from thefabrication tool 21 by executing an E39 service, such as“E39:S14F1_GetPJ” or others. The job rearrangement module 122 acquiresall control jobs by executing an E39 service, such as“E39:S14F1_GetAllCJ” or others, and process jobs therewith by executingan E39 service, such as “E39:S14F1_GetPJ” or others. A control jobcontaining a common recipe is detected by comparison with the currentlyperformed recipe. The detected control job with priority equaling thatof the current control job is moved to the top of job queue by executingan E94 service, such as “E94:S16F27_CJHOQ” or others.

Three preferred approaches, namely single-carrier optimization,multi-carrier optimization and precedence optimization, are describedhereafter for job queue rearrangement. FIGS. 3 a, 4 a and 5 a areschematic diagrams of fabrication tools illustrating three embodimentsaccording to the present invention. The fabrication tool 21 loads twocarriers 22 and 23, wherein the carrier 22 contains four wafer lots,221, 222, 223 and 224 which are processed by recipe “PPID1”, “PPID2”,“PPID1” and “PPID2” respectively, and the carrier 23 also contains fourwafer lots, 231, 232, 233 and 234 which are processed by recipe “PPID1”,“PPID2”, “PPID1” and “PPID2” respectively. FIGS. 3 b, 4 b and 5 b areschematic diagrams of the job queue according to the three embodimentsof the present invention.

In the single-carrier optimization approach, referring to FIG. 3 a,wafer lots are clustered according to different recipes and carriersinto CPP groups by the job initiation module 121. Subsequently, fourprocess jobs, such as “PJ1”, “PJ2”, “PJ3” and “PJ4”, respectivelycontaining lots {221, 223}, {222, 224}, {231, 233}, and {232, 234}, arecreated by the job initiation module 121, and two control jobs, such as“CJ1” and “CJ2”, respectively containing process jobs {PJ1, PJ2} and{PJ3, PJ4} are created for each carrier. Therefore, referring to FIG. 3b, when the fabrication tool 21 sequentially executes process jobs“PJ1”, “PJ2”, “PJ3” and “PJ4”, the fabrication task is sequentiallyperformed upon wafer lots 221, 223, 222, 224, 231, 233, 232 and 234.While fabrication tool 21 performs preparations eight times for eachrecipe change according to the conventional arrangement, using thisapproach, preparation tasks are only performed at the beginning of eachprocess job.

In the multi-carrier optimization approach, referring to FIG. 4 a, waferlots are clustered according to different recipes and carriers into CPPgroups by the job initiation module 121. Four process jobs, such as“PJ1”, “PJ2”, “PJ3” and “PJ4”, respectively containing lots {221, 223},{222, 224}, {231, 233} and {232, 234} are created by the job initiationmodule 121, and four control jobs, such as “CJ1”, “CJ2”, “CJ3” and“CJ4”, are respectively created for each process job. When the jobrearrangement module 122 receives the process job “PJ1” event from thefabrication tool, it detects a control job “CJ3” containing a commonprocess recipe and moves the control job “CJ3” to the top of the jobqueue, enabling the fabrication tool 21 to subsequently execute thecontrol job “CJ3”. Therefore, referring to FIG. 4 b, when thefabrication tool 21 sequentially executes process jobs “PJ1”, “PJ3”,“PJ2” and “PJ4”, and the fabrication tasks are sequentially performedupon wafer lots 221, 223, 231, 233, 222, 224, 232 and 234. Using thisapproach, the fabrication tool 21 only performs two preparations at thebeginning of process jobs “PJ1” and “PJ2”.

In the precedence optimization approach, referring to FIG. 5 a, waferlots are clustered according to different recipes and carriers by thejob initiation module 121 into CPP groups. Four process jobs, such as“PJ1”, “PJ2”, “PJ3” and “PJ4”, respectively containing lots {221, 223},{222, 224}, {231, 233} and {232, 234} are created by the job initiationmodule 121, and four control jobs, such as “CJ1”, “CJ2”, “CJ3” and“CJ4”, are respectively created for each process job. The job initiationmodule 121 sets a priority for each control job according to wafercarrier/lot information from the manufacturing execution system (MES)(not shown). For example, priorities of control jobs, such as “CJ1”,“CJ2”, “CJ3” and “CJ4”, are set to 10, 10, 1 and 1 respectively. The jobinitiation module 121 rearranges the control jobs in descending orderaccording to the priorities. Therefore, referring to FIG. 5 b, when thefabrication tool 21 sequentially executes process jobs “PJ3”, “PJ4”,“PJ1” and “PJ2”, the fabrication task is performed upon wafer lots 231,233, 232, 234, 221, 223, 222 and 224. Using this approach, thearrangement of wafer lots considers not only common recipes but alsopriority.

FIG. 6 is a flowchart showing the method of job queue managementaccording to the present invention. The method begins in step S611 byacquiring wafer lot information regarding which specific wafers requireprocessing by which recipe from a manufacturing execution system (MES)(not shown). In step S621, wafer lots processed by a common recipe areclustered into a common process program (CPP) group. Process jobscontaining wafer lots in the CPP group are created in step S622, andeach process job corresponds to the CPP group. Control jobs associatedwith at least one process job with priorities are created in step S623and rearranged in descending order according to control job prioritiesin step S624.

Subsequent to the initiation, the process proceeds to step S631 toreceive a process job start event from the fabrication tool 21. In stepS632, a current process recipe is acquired from the fabrication tool 21.In step S633, a control job containing common recipe is detected bycomparison with the currently performed recipe. Whether the priority ofthe detected control job equals that of the current process job isdetermined in step S641, if so, the process proceeds to step S642; andotherwise, proceeds to step S643. In step S642, the detected control jobis moved to the top of the job queue. Whether the job queue is empty isdetermined in step S643, and if so, the process is complete; otherwise,the process proceeds to step S631.

The invention additionally discloses a storage medium storing a computerprogram providing the disclosed method of job queue management, as shownin FIG. 7. The computer program product includes a storage medium 70having computer readable program code embodied in the medium for use ina computer system, the computer readable program code comprising atleast computer readable program code 721 acquiring wafer lot informationregarding which specific wafers require processing by which recipe froma MES or a CIM system, computer readable program code 722 creating a CPPgroup containing wafer lots which are processed by a common recipe,computer readable program code 723 creating a process job correspondingto a CPP group, computer readable program code 724 creating a controljob corresponding to a process job, computer readable program code 725rearranging control jobs according to priorities thereof in descendingorder, computer readable program code 726 receiving a process job startevent from a fabrication tool, computer readable program code 727acquiring a current process recipe from a fabrication tool, computerreadable program code 728 detecting a control job containing a commonrecipe by comparison with the currently performed recipe and computerreadable program code 729 moving the detected control job to the top ofthe queue if its priority equaling that of the current process job.

The methods and system of the present invention, or certain aspects orportions thereof, may take the form of program code (i.e., instructions)embodied in tangible media, such as floppy diskettes, CD-ROMS, harddrives, or any other machine-readable storage medium, wherein, when theprogram code is loaded into and executed by a machine, such as acomputer, the machine becomes an apparatus for practicing the invention.The methods and apparatus of the present invention may also be embodiedin the form of program code transmitted over some transmission medium,such as electrical wiring or cabling, through fiber optics, or via anyother form of transmission, wherein, when the program code is receivedand loaded into and executed by a machine, such as a computer, themachine becomes an apparatus for practicing the invention. Whenimplemented on a general-purpose processor, the program code combineswith the processor to provide a unique apparatus that operatesanalogously to specific logic circuits.

Although the present invention has been described in its preferredembodiments, it is not intended to limit the invention to the preciseembodiments disclosed herein. Those who are skilled in this technologycan still make various alterations and modifications without departingfrom the scope and spirit of this invention. Therefore, the scope of thepresent invention shall be defined and protected by the following claimsand their equivalents.

1. A system of job queue management, comprising: a fabrication tool; anda job queue management apparatus configured to acquire a plurality ofwafer lot records individually regarding a plurality of wafers processedby a common recipe, cluster the wafer lots processed by the commonrecipe into a group, create a process job corresponding to the group andstore the process job in a job queue of the fabrication tool, whereinthe job queue management apparatus creates a control job correspondingto the process job, stores the control job in the job queue of thefabrication tool, receives an event indicating starting a new processjob from the fabrication tool, acquires an executed recipe correspondingto the new process job, and moves the control job containing the processjob performing the common recipe common to the executed recipe to thetop of the queue of the fabrication tool.
 2. The system of claim 1wherein the wafer lot records are acquired from a manufacturingexecution system (MES) or a computer integrated manufacturing (CIM)system.
 3. The system of claim 1 wherein the job queue managementapparatus creates a control job corresponding to all process jobs withina carrier, and stores the control job in the job queue of thefabrication tool.
 4. The system of claim 1 wherein the job queuemanagement apparatus creates a control job corresponding to the processjob and a priority thereof, stores the control job in the job queue ofthe fabrication tool, and arranges the control job according to thepriority thereof.
 5. The system of claim 1 wherein the fabrication toolprovides a plurality of services compliant to a 300 mm semiconductorequipment and material international (SEMI) standard.
 6. The system ofclaim 5 wherein the job queue management apparatus creates the processjob corresponding to the group by executing the service, creates acontrol job corresponding to all process jobs within a carrier byexecuting the service, and stores the control job in the job queue ofthe fabrication tool by executing the service.
 7. The system of claim 5wherein the job queue management apparatus creates a control jobcorresponding to the process job and a priority thereof by executing theservice, stores the control job in the job queue of the fabrication toolby executing the service, and arranges the control job according to thepriority thereof by executing the service.
 8. A method of job queuemanagement, the method comprising using a computer to perform the stepsof: acquiring a plurality of wafer lot records individually regarding aplurality of wafers processed by a common recipe; clustering the waferlots processed by the common recipe into a group; creating a process jobcorresponding to the group; storing the process job in a job queue of afabrication tool, creating a control job corresponding to the processjob; storing the control job in the job queue of the fabrication tool;receiving an event indicating starting a new process job from thefabrication tool; acquiring an executed recipe corresponding to the newprocess job; and moving the control job containing the process jobperforming the common recipe common to the executed recipe to the top ofthe queue of the fabrication tool.
 9. The method of claim 8 wherein thewafer lot records are acquired from a manufacturing execution system(MES) or a computer integrated manufacturing (CIM) system.
 10. Themethod of claim 8 further comprising the steps of: creating a controljob corresponding to all process jobs within a carrier; and storing thecontrol job in the job queue of the fabrication tool.
 11. The method ofclaim 8 further comprising the steps of: creating a control jobcorresponding to the process job and a priority thereof; storing thecontrol job in the job queue of the fabrication tool; and arranging thecontrol job according to the priority thereof.
 12. The method of claim 8wherein the fabrication tool provides a plurality of services compliantto a 300 mm semiconductor equipment and material international (SEMI)standard.
 13. The method of claim 12 further comprising the steps of:creating the process job corresponding to the group by executing theservice; creating a control job corresponding to all process jobs withina carrier by executing the service; and storing the control job in thejob queue of the fabrication tool by executing the service.
 14. Themethod of claim 12 further comprising the steps of: creating a controljob corresponding to the process job and a priority thereof by executingthe service; storing the control job in the job queue of the fabricationtool by executing the service; and arranging the control job accordingto the priority thereof by executing the service.
 15. A machine-readablestorage medium storing a computer program which when executed performs amethod of job queue management, the method comprising the steps of:acquiring a plurality of wafer lot records individually regarding aplurality of wafers processed by a common recipe; clustering the waferlots processed by the common recipe into a group; creating a process jobcorresponding to the group; storing the process job in a job queue of afabrication tool; creating a control job corresponding to the processjob; storing the control job in the job queue of the fabrication tool;receiving an event indicating starting a new process job from thefabrication tool; acquiring an executed recipe corresponding to the newprocess job; and moving the control job containing the process jobperforming the common recipe common to the executed recipe to the top ofthe queue of the fabrication tool.
 16. The machine-readable storagemedium of claim 15 wherein the wafer lot records are acquired from amanufacturing execution system (MES) or a computer integratedmanufacturing (CIM) system.
 17. The computer-readable storage medium ofclaim 15, wherein the method further comprises the steps of: creating acontrol job corresponding to all process jobs within a carrier; andstoring the control job in the job queue of the fabrication tool. 18.The computer-readable storage medium of claim 15, wherein the methodfurther comprises the steps of: creating a control job corresponding tothe process job and a priority thereof; storing the control job in thejob queue of the fabrication tool; and arranging the control jobaccording to the priority thereof.
 19. The computer-readable storagemedium of claim 15 wherein the fabrication tool provides a plurality ofservices compliant to a 300 mm semiconductor equipment and materialinternational (SEMI) standard.
 20. The computer-readable storage mediumof claim 19, wherein the method further comprises the steps of: creatingthe process job corresponding to the group by executing the service;creating a control job corresponding to all process jobs within acarrier by executing the service; and storing the control job in the jobqueue of the fabrication tool by executing the service.
 21. Thecomputer-readable storage medium of claim 19, wherein the method furthercomprises the steps of: creating a control job corresponding to theprocess job and a priority thereof by executing the service; storing thecontrol job in the job queue of the fabrication tool by executing theservice; and arranging the control job according to the priority thereofby executing the service.